Driving wheels
The driving wheel is a key precision transmission component in semiconductor manufacturing equipment, mainly used in high-precision scenarios such as wafer transfer and lithography platform positioning. In the manufacturing process of semiconductors and LCD panels, the core value of polyurethane drive wheels lies not in “rolling”, but in “cleanliness, anti-static, protection, and stability”. So the development of materials for such drive wheels has become extremely important. Additives in ordinary polyurethane may generate particles or release chemical gases (AMC – air molecule pollutants) during friction, contaminating the wafer.



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